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![]() "Frogwatch" wrote in message ... Eisboch: Yes, I am interested in a small sputter system. Right now, to do e- beam evap costs me at least $100 just to open the chamber cuz I dont own it. I have all the parts for a large sputter system except the vac pumps and targets. I have thickness monitors, gas flow controls, chamber, RF supplies but putting it together is sorta involved and would involve employees. A smaller assembled system would be nice. ------------------------------------ Can't make any promises yet, but let me check into something for you. There is a small ( chamber is about 2-3 ft diameter, if I remember correctly) sputter system that a business partner funded for a start-up company doing MEMs coatings. The company didn't make it, and my partner passed away. His wife technically owns it and my son and I agreed to help her find a home for it. Last I knew it was sitting in a corner of my old company collecting dust. It's a nice system.... fully equipped. It was brand new in 2002 or 2003 and has had very little use. I believe it has S-guns in it that can be arranged for different types of substrate shapes plus both RF and DC sputter supplies. I've often thought of buying it myself and putting it in my garage but I don't have 3 phase power available easily. Is your email real? I have a couple of thoughts. If it's of interest, maybe I'll buy it (assuming the owner will accept a reasonable offer) and contribute it for a little "piece of the pie" so to speak. Eisboch |
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